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As being the chemical properties of the deposited layer are relevant to the Bodily Houses of your layer, by way of example dielectric Houses and resistance to etching, it would be fascinating to deliver deposited levels with uniform chemical. Though prior tactics to supply uniform chemical reactions and depositions by injecting the two SiH4 and O2 in the processing chamber have satisfied with some good results, more improvements in the chemical uniformity of deposited levels is constantly sought.

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Merely Through illustration, the approaches and apparatus from the present creation are used in HDP/CVD processes. The strategies and apparatus is often applied to other processes for semiconductor substrates, as an example These used in the development of integrated circuits.

FIG. 6D illustrates a bottom view of your fuel distributor as in FIGS. 6A and 613 and the 2nd channel along with the many branches that stretch towards the plurality of second openings according to an embodiment with the current invention.

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Operators start off and halt equipment and report the info manufactured. In addition they reply to abnormalities, ascertain the results in, and choose corrective action.

thirteen. The tactic of assert twelve even more comprising inserting a part of the gas distributor into your aid though the fuel distributor is aligned Using the assistance in the first orientation.

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A fuel distributor to energy distribution process be used within a semiconductor process chamber comprises a overall body. Your body includes a initial channel fashioned throughout the physique and adapted to move a first fluid from a primary fluid supply line in the more info 1st channel to a primary opening.

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A stage 570 mixes the first fluid and the next fluid inside the chamber outside the human body of the fuel distributor. A action 580 deposits reactive merchandise within the wafer with HDP/CVD process. A action 590 eliminates the semiconductor wafer from the chamber. It ought to be observed that many of the measures proven in FIG. 5 are carried out at the same time or substantially exactly the same time in order that at the very least a part of Every single stage is executed when no less than a percentage of Yet another stage is performed. One example is, HDP voltage is applied to the coils with step 540, when the primary fluid passes with the first channel with action 550 and the second fluid passes in the 2nd channel with stage 560 and reactive items are deposited around the wafer with phase 580.

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